Semiconductor inspection

Optimizing semiconductor quality

In the semiconductor and solar industries, quality inspection is crucial to ensuring the reliability and performance of end products. Advanced infrared imaging technologies, such as SWIR and photon emission microscopy, play a vital role in detecting defects and impurities in materials like silicon and semiconductor wafers. By identifying flaws early in the manufacturing process, these inspection techniques help optimize product yield and reduce potential failures, ultimately supporting efficient, high-quality production.

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Infrared Semiconductor Inspection

Infrared semiconductor inspection can be used to optimize manufacturing processes. Product yield, quality and failure analysis are becoming key in the semiconductor industry, both on wafer level, as well as on die or packaged device level.

Emission microscopy: Photon emission microscopy, or electroluminescence imaging, is a relatively new failure analysis technique for detecting photonic radiation from a defect site, primarily due to carrier recombination mechanisms. Essentially, the primary role of infrared semiconductor inspections identifies and localizes defects.
 

Solar Ingot inspection

Silicon (Si) is a common material used for the production of semiconductor wafers, which are eventually processed into (opto-)electronic components for use in various electronics products. Wafers made from poor quality silicon can cause deficiencies in components or may cause them to fail entirely. Impurities, defects, voids, or inclusions in silicon bricks and ingots should be inspected before they are further processed into wafers.

SWIR InGaAs cameras are widely used in the semiconductor industry for the inspection of crystalline silicon (Si) bricks or ingots. Impurities and inclusions inside the brick or ingot can be easily detected using a SWIR camera and a light source emitting with a wavelength longer than 1150 nm. The reason for this is that the bandgap in this semiconductor material (Si) does not absorb the lower energy and longer wavelength SWIR photons, whereas visible photons (which have higher energy) are absorbed.

In short, this allows inspectors to see through the ingot, easily spotting any complications that may impact the quality of the final product. This makes SWIR InGaAs cameras an excellent, straightforward inspection tool for a smooth wafer production process.

Xenics
MANX
Short Wave Infrared cameras (SWIR) MANX
Xenics
LYNX
Short Wave Infrared cameras (SWIR) LYNX
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